BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line

Schram, TomTomSchramSmets, QuentinQuentinSmetsHeyne, MarkusMarkusHeyneGroven, BenjaminBenjaminGrovenKunnen, EddyEddyKunnenThiam, ArameArameThiamDevriendt, KatiaKatiaDevriendtDelabie, AnneliesAnneliesDelabieLin, DennisDennisLinChiappe, DanieleDanieleChiappeAsselberghs, IngeIngeAsselberghsLux, MarcelMarcelLuxBrus, StephanStephanBrusHuyghebaert, CedricCedricHuyghebaertSayan, SafakSafakSayanJuncker, AurélieAurélieJunckerCaymax, MattyMattyCaymaxRadu, IulianaIulianaRadu2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29393BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot lineProceedings paperhttp://ieeexplore.ieee.org/document/8242336