Efficient sensitivity-based capacitance modeling for systematic and random geometric variations

Yu, BiBiYuHarpe, PieterPieterHarpevan der Meijs, N.P.N.P.van der Meijs2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20184Efficient sensitivity-based capacitance modeling for systematic and random geometric variationsProceedings paper