Quantitative analysis of TM lateral leakage in foundry fabricated silicon rib waveguides

Hope, A.A.HopeNguyen, T.G.T.G.NguyenMitchell, A.A.MitchellBogaerts, WimWimBogaerts2021-10-232021-10-2320161041-1135https://imec-publications.be/handle/20.500.12860/26734Quantitative analysis of TM lateral leakage in foundry fabricated silicon rib waveguidesJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7328266