Quantitative analysis of trace metals in silicon nitride films by a vapor phase decomposition/solution collection approach

Vereecke, GuyGuyVereeckeSchaekers, MarcMarcSchaekersVerstraete, KurtKurtVerstraeteArnauts, SophiaSophiaArnautsHeyns, MarcMarcHeynsPlante, W.W.Plante2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4910Quantitative analysis of trace metals in silicon nitride films by a vapor phase decomposition/solution collection approachJournal article