Karouta, F.F.KaroutaJacobs, B.B.JacobsMoerman, IngridIngridMoermanJacobs, KoenKoenJacobsWeyher, J. L.J. L.WeyherNowak, G.G.NowakCrane, R.R.CraneHageman, P.P.Hageman2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4056Highly chemical reactive ion etching of gallium nitrideJournal articlehttp://nsr.mij.mrs.org/5S1/W11.76/