Quantification of shot noise contributions to contact hole local CD non-uniformity

Gronheid, RoelRoelGronheidWinroth, GustafGustafWinrothVaglio Pret, AlessandroAlessandroVaglio PretYounkin, ToddToddYounkin2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20760Quantification of shot noise contributions to contact hole local CD non-uniformityProceedings paper