Takeuchi, ShotaroShotaroTakeuchiNguyen, DuyDuyNguyenGoossens, JozefienJozefienGoossensCaymax, MattyMattyCaymaxLoo, RogerRogerLoo2021-10-182021-10-1820100040-6090https://imec-publications.be/handle/20.500.12860/18063Si1-xGex growth using Si3H8 by low temperature chemical vapor depositionJournal article