Extraction of the interface and oxide charge density in silicon-on-insulator MOSFETs

Simoen, EddyEddySimoenClaeys, CorCorClaeysLukyanchikova, N.N.LukyanchikovaPetrichuk, M.M.PetrichukGarbar, N.N.GarbarMartino, Joao AntonioJoao AntonioMartinoSonnenberg, V.V.Sonnenberg2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1485Extraction of the interface and oxide charge density in silicon-on-insulator MOSFETsProceedings paper