Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber

Thakare, DeveshDeveshThakareWu, MeiyiMeiyiWuOpsomer, KarlKarlOpsomerSaadeh, QaisQaisSaadehSoltwisch, VictorVictorSoltwischNaujok, PhilippPhilippNaujokDetavernier, ChristopheChristopheDetavernierDattilo, DavideDavideDattiloFoltin, MarkusMarkusFoltinGoodyear, AndyAndyGoodyearCooke, MikeMikeCookeDelabie, AnneliesAnneliesDelabiePhilipsen, VickyVickyPhilipsen2024-03-122023-08-272024-03-1220231932-5150WOS:001046441600010https://imec-publications.be/handle/20.500.12860/42412Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorberJournal article10.1117/1.JMM.22.2.024403WOS:001046441600010REFLECTIONSURFACE