On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS

Janssens, TomTomJanssensHuyghebaert, CedricCedricHuyghebaertVandervorst, WilfriedWilfriedVandervorstGildenpfennig, A.A.Gildenpfennig2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7686On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEISJournal article