Ishikawa, KenjiKenjiIshikawaIshijima, TatsuoTatsuoIshijimaShirafuji, TatsuruTatsuruShirafujiArmini, SilviaSilviaArminiDespiau-Pujo, EmilieEmilieDespiau-PujoGottscho, Richard ARichard AGottschoLeusink, GertGertLeusinkMarchack, NathanNathanMarchackMurayama, TakahideTakahideMurayamaOehrlein, Gottlieb S.Gottlieb S.OehrleinPark, SangwukSangwukParkHayashi, HisatakaHisatakaHayashiKinoshita, KeizoKeizoKinoshita2021-10-272021-10-2720190021-4922https://imec-publications.be/handle/20.500.12860/33199Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspectiveJournal articlehttps://doi.org/10.7567/1347-4065/ab163e