Van Bael, M.K.M.K.Van BaelNelis, DaniëlDaniëlNelisHardy, A.A.HardyMondelaers, D.D.MondelaersVan Werde, K.K.Van WerdeD'Haen, JanJanD'HaenVanhoyland, G.G.VanhoylandVan den Rul, H.H.Van den RulMullens, J.J.MullensVan Poucke, L.C.L.C.Van PouckeFrederix, FilipFilipFrederixWouters, DirkDirkWouters2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6902Aequeous chemical solution deposition for ferroelectric thin filmsJournal article