Analysis of dopant diffusion and defects in fin structure using an atoministic kinetic Monte Carlo approach

Noda, TaijiTaijiNodaKambham, AjayAjayKambhamVrancken, ChristaChristaVranckenThean, AaronAaronTheanHoriguchi, NaotoNaotoHoriguchiVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22869Analysis of dopant diffusion and defects in fin structure using an atoministic kinetic Monte Carlo approachProceedings paper