Thermo-mechanical and fracture properties in single crystal silicon

Masolin, AlexAlexMasolinBouchard, Pierre-OlivierPierre-OlivierBouchardMartini, RobertoRobertoMartiniBernacki, MarcMarcBernacki2021-10-202021-10-2020120022-2461https://imec-publications.be/handle/20.500.12860/21117Thermo-mechanical and fracture properties in single crystal siliconJournal articlehttp://dx.doi.org/10.1007/s10853-012-6713-7