Afanasiev, ValeriValeriAfanasievKeunen, K.K.KeunenStesmans, AndreAndreStesmansJivanescu, M.M.JivanescuTokei, ZsoltZsoltTokeiBaklanov, MikhaïlMikhaïlBaklanovBeyer, GeraldGeraldBeyer2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/18454Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)Journal article