Scanning spreading resistance microscopy for 3D-carrier Pprofiling in FinFET-based structures

Mody, JayJayModyEyben, PierrePierreEybenPolspoel, WouterWouterPolspoelJurczak, GosiaGosiaJurczakVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14179Scanning spreading resistance microscopy for 3D-carrier Pprofiling in FinFET-based structuresProceedings paper