Hantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeCelano, UmbertoUmbertoCelanoMoussa, AlainAlainMoussaArstila, KaiKaiArstilaEyben, PierrePierreEybenMajeed, BivraghBivraghMajeedSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanWerner, ThiloThiloWernerVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-2020120167-9317https://imec-publications.be/handle/20.500.12860/20776TiN scanning probes for electrical profiling of nanoelectronics device structuresJournal articlehttp://dx.doi.org/10.1016/j.mee.2012.04.026