200 mm industrial-ready dispersion-free GaN-on-Si buffer technology for 650 V rated power application

Zhao, MingMingZhaoLi, XiangdongXiangdongLiDecoutere, StefaanStefaanDecoutere2021-10-282021-10-282019https://imec-publications.be/handle/20.500.12860/34545200 mm industrial-ready dispersion-free GaN-on-Si buffer technology for 650 V rated power applicationMeeting abstract