Investigations on the plasma-surface interaction during atomic layer etching of thin transition-metal dichalcogenide films

Heyne, MarkusMarkusHeynede Marneffe, Jean-FrancoisJean-Francoisde MarneffeMeersschaut, JohanJohanMeersschautNuytten, ThomasThomasNuyttenRadu, IulianaIulianaRaduNeyts, Erik C.Erik C.NeytsBogaerts, AnnemieAnnemieBogaertsDe Gendt, StefanStefanDe Gendt2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25382Investigations on the plasma-surface interaction during atomic layer etching of thin transition-metal dichalcogenide filmsProceedings paper