Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S

Groven, BenjaminBenjaminGrovenCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsRadu, IulianaIulianaRaduDelabie, AnneliesAnneliesDelabie2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28423Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2SMeeting abstracthttp://www.nanomanufacturing.nl/ASD2017/programbook.pdf