Device performance of 90nm nMOSFETs at liquid nitrogen temperature

Takakura, K.K.TakakuraHayama, K.K.HayamaOhyama, H.H.OhyamaMercha, AbdelkarimAbdelkarimMerchaLee, Shih-ChungShih-ChungLeeSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9661Device performance of 90nm nMOSFETs at liquid nitrogen temperatureProceedings paper