High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions

French, Roger H.Roger H.FrenchBernfeld, Adam S.Adam S.BernfeldTran, Hoang V.Hoang V.TranAdelman, Douglas J.Douglas J.AdelmanLiberman, VladimirVladimirLibermanRothschild, MordechaiMordechaiRothschildHendrickx, EricEricHendrickxVan Roey, FriedaFriedaVan Roey2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13738High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactionsProceedings paper