Direct measurement of Leff and channel profile in MOSFETs using 2-D carrier profiling techniques

De Wolf, PeterPeterDe WolfStephenson, RobertRobertStephensonBiesemans, SergeSergeBiesemansJansen, PhilippePhilippeJansenBadenes, GonçalGonçalBadenesDe Meyer, KristinKristinDe MeyerVandervorst, WilfriedWilfriedVandervorst2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2519Direct measurement of Leff and channel profile in MOSFETs using 2-D carrier profiling techniquesProceedings paper