RF-power, driver for electrostatic RF-MEMS devices

Rottenberg, XavierXavierRottenbergBrebels, StevenStevenBrebelsDe Raedt, WalterWalterDe RaedtNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmans2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8089RF-power, driver for electrostatic RF-MEMS devicesProceedings paper