300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials

Moussa, AlainAlainMoussaBogdanowicz, JanuszJanuszBogdanowiczGroven, BenjaminBenjaminGrovenMorin, PierrePierreMorinBeggiato, MatteoMatteoBeggiatoSaib, MohamedMohamedSaibSantoro, G.G.SantoroAbramovitz, Y.Y.AbramovitzHouchens, K.K.HouchensBen Nissim, S.S.Ben NissimMeir, N.N.MeirHung, J.J.HungUrbanowicz, A.A.UrbanowiczKoret, R.R.KoretTurovets, I.I.TurovetsLorusso, GianGianLorussoCharley, Anne-LaureAnne-LaureCharley2024-04-172024-04-172023978-1-5106-6099-10277-786XWOS:001022962000056https://imec-publications.be/handle/20.500.12860/43846300mm in-line metrologies for the characterization of ultra-thin layer of 2D materialsProceedings paper10.1117/12.2657968978-1-5106-6100-4WOS:001022962000056