Improvement of carbon depth profiling within shallow structures by secondary ion mass spectrometry (SIMS)

Merkulov, AlexAlexMerkulovFranquet, AlexisAlexisFranquetTilmann, RitaRitaTilmann2025-12-012025-12-0120260042-207Xhttps://imec-publications.be/handle/20.500.12860/58477engImprovement of carbon depth profiling within shallow structures by secondary ion mass spectrometry (SIMS)Journal article10.1016/j.vacuum.2025.114893WOS:001619240000001CLUSTERBEAMS