Silicon photonic MEMS: Exploiting mechanics at the nanoscale to enhance photonic integrated circuits

Quack, NielsNielsQuackSattari, HamedHamedSattariTakabayashi, Alain Y.Alain Y.TakabayashiZhang, YuYuZhangEdinger, PierrePierreEdingerErrando-Herranz, CarlosCarlosErrando-HerranzGylfason, KristinnKristinnGylfasonWang, xiaojingxiaojingWangNiklaus, FrankFrankNiklausJezzini, MoisesMoisesJezziniHwang, How YuanHow YuanHwangO'Brien, PeterPeterO'BrienPorcel, Marco A.G.Marco A.G.PorcelLerma Arce, ChristinaChristinaLerma ArceKumar, SauravSauravKumarAbasahl, BanafshehBanafshehAbasahlVerheyen, PeterPeterVerheyenBogaerts, WimWimBogaerts2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33840Silicon photonic MEMS: Exploiting mechanics at the nanoscale to enhance photonic integrated circuitsProceedings paperhttps://ieeexplore.ieee.org/document/8696652