Nickl, AndreasAndreasNicklStuyck, Nard DumoulinNard DumoulinStuyckSteinacker, PaulPaulSteinackerCifuentes, Jesus D.Jesus D.CifuentesSerrano, SantiagoSantiagoSerranoFeng, MengKeMengKeFengVahapoglu, EnsarEnsarVahapogluHudson, Fay E.Fay E.HudsonChan, Kok WaiKok WaiChanKubicek, StefanStefanKubicekJussot, JulienJulienJussotCanvel, YannYannCanvelBeyne, SofieSofieBeyneShimura, YosukeYosukeShimuraLoo, RogerRogerLooGodfrin, ClementClementGodfrinRaes, BartBartRaesBaudot, SylvainSylvainBaudotWan, DannyDannyWanLaucht, ArneArneLauchtYang, Chih-HwanChih-HwanYangLim, Wee HanWee HanLimSaraiva, AndreAndreSaraivaEscott, Christopher C.Christopher C.EscottDe Greve, KristiaanKristiaanDe GreveDzurak, Andrew S.Andrew S.DzurakTanttu, TuomoTuomoTanttu2026-10-212026-10-2120262041-1723https://imec-publications.be/handle/20.500.12860/60613Silicon spin qubits are a promising platform for quantum computing due to their high coherence, controllability, and CMOS manufacturability, yet scalable implementations have so far been limited to a few qubits. Here, to take a step towards larger qubit systems, we tune and coherently control an eight-dot linear array of silicon spin qubits fabricated in a 300 mm CMOS-compatible foundry process, establishing operational scalability beyond the two-qubit regime. All eight qubits are successfully tuned and characterized as four double-dot pairs, exhibiting Ramsey dephasing times up to 41(2) μs and Hahn-echo coherence times up to 1.31(4) ms. Readout of the central four qubits is achieved via a cascaded charge-sensing protocol, enabling high-fidelity measurements of the entire multi-qubit array in a two step process. Additionally, we demonstrate a two-qubit gate operation between adjacent qubits with low phase noise. We show that silicon spin qubit arrays can be scaled to medium-sized arrays of 8 qubits while maintaining system coherence.engEight-qubit operation of a 300 mm SiMOS foundry-fabricated deviceJournal article10.1038/s41467-026-74597-6WOS:001816919300012QUANTUM PROCESSORQUBIT