On the apparent decay length of metal at the metal-oxide/Si interface

Conard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstFranquet, AlexisAlexisFranquetBerghmans, BartBartBerghmansVan Elshocht, SvenSvenVan Elshocht2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11899On the apparent decay length of metal at the metal-oxide/Si interfaceOral presentation