Sivoththaman, SivanarayanamoorthySivanarayanamoorthySivoththamanLaureys, WimWimLaureysNijs, JohanJohanNijsMertens, RobertRobertMertens2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/888Rapid thermal oxidation of heavily doped silicon for advanced solar cell processingProceedings paper