Near-interfacial thermal donor generation during processing of (100)Si/low-k Si-oxycarbide insulator structures revealed by electron spin resonance

Stesmans, AndreAndreStesmansIacovo, S.S.IacovoAfanasiev, ValeriValeriAfanasievBaklanov, MikhaïlMikhaïlBaklanovUrbanowicz, A.A.Urbanowicz2021-10-222021-10-2220140268-1242https://imec-publications.be/handle/20.500.12860/24563Near-interfacial thermal donor generation during processing of (100)Si/low-k Si-oxycarbide insulator structures revealed by electron spin resonanceJournal articlehttp://iopscience.iop.org/0268-1242/29/9/095008/article