Rottenberg, XavierXavierRottenberg2021-10-202021-10-202012-03https://imec-publications.be/handle/20.500.12860/21429Journal articlehttp://www.memsjournal.com/2012/03/silicon-germanium-sige-technolog-germanium-sige-technology-for-mems-and-nems-fabrication.html