ESD on-wafer characterization: Is TLP still the right measurement tool?

Scholz, MirkoMirkoScholzLinten, DimitriDimitriLintenThijs, StevenStevenThijsSangameswaran, SandeepSandeepSangameswaranSawada, MasanoriMasanoriSawadaNakaie, T.T.NakaieHasebe, TakumiTakumiHasebeGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182009-100018-9456https://imec-publications.be/handle/20.500.12860/16176ESD on-wafer characterization: Is TLP still the right measurement tool?Journal article