Ultrathin film high-k dielectrics from aqueous CSD: relations between deposition route, material properties and electrical properties

Hardy, AnAnHardyVan Elshocht, SvenSvenVan ElshochtVan Bael, MarliesMarliesVan BaelD'Haen, JanJanD'HaenDe Gendt, StefanStefanDe GendtAdelmann, ChristophChristophAdelmannConard, ThierryThierryConardFranquet, AlexisAlexisFranquetRichard, OlivierOlivierRichardD'Olieslaeger, MarcMarcD'OlieslaegerHeyns, MarcMarcHeynsMullens, J.J.Mullens2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13842Ultrathin film high-k dielectrics from aqueous CSD: relations between deposition route, material properties and electrical propertiesOral presentation