Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM tool

Spampinato, ValentinaValentinaSpampinatoDialameh, MasoudMasoudDialamehFleischmann, ClaudiaClaudiaFleischmannFranquet, AlexisAlexisFranquetVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31836Actual 3D analysis of hybrid arrays with in-situ SPM in a combined TOF-SIMS/SPM toolOral presentation