De Wolf, PeterPeterDe WolfClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.HellemansNiedermann, P.P.NiedermannHänni, W.W.Hänni2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2517Cross-sectional nano-spreading resistance profilingJournal article