Brems, StevenStevenBremsHauptmann, MarcMarcHauptmannCamerotto, ElisabethElisabethCamerottoPacco, AntoineAntoinePaccoKim, Tae-GonTae-GonKimXu, XiuMeiXiuMeiXuWostyn, KurtKurtWostynMertens, PaulPaulMertensDe Gendt, StefanStefanDe Gendt2021-10-222021-10-2220142162-8769https://imec-publications.be/handle/20.500.12860/23581Nanoparticle removal with megasonics: A reviewJournal articlehttp://jss.ecsdl.org/content/3/1/N3010.full