From fundamental insights into growth and nucleation mechanisms to area-selective deposition

Delabie, AnneliesAnneliesDelabieSoethoudt, JobJobSoethoudtPourtois, GeoffreyGeoffreyPourtoisVan Elshocht, SvenSvenVan ElshochtBarla, KathyKathyBarlaGrillo, FabioFabioGrilloMarques, EstebanEstebanMarquesVan Ommen, RuudRuudVan Ommen2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30585From fundamental insights into growth and nucleation mechanisms to area-selective depositionMeeting abstracthttps://www2.avs.org/symposium2018/Papers/Paper_TF+AM+EM+PS-TuM10.html