A ViT-Based Approach for Enhanced Defect Classification in Nano-Ridge Engineering Using Multi-Resolution Images

Dey, BappadityaBappadityaDeyTandecki, TomTomTandeckiBelgharat, AyaAyaBelgharatSwekis, PeterPeterSwekisAlcotte, ReynaldReynaldAlcotteMols, YvesYvesMolsKunert, BernardetteBernardetteKunertHalder, SandipSandipHalder2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300106https://imec-publications.be/handle/20.500.12860/45964A ViT-Based Approach for Enhanced Defect Classification in Nano-Ridge Engineering Using Multi-Resolution ImagesProceedings paper10.1117/12.3052289978-1-5106-8639-7WOS:001514426300106SI