Determining the impact of statistical fluctuations on resist line edge roughness

Leunissen, PeterPeterLeunissenErcken, MoniqueMoniqueErckenPatsis, George P.George P.Patsis2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9192Determining the impact of statistical fluctuations on resist line edge roughnessOral presentation