Waiblinger, MarkusMarkusWaiblingerBret, TristanTristanBretJonckheere, RikRikJonckheereVan Den Heuvel, DieterDieterVan Den Heuvel2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21824Ebeam based mask repair as door opener for defect free EUV masksProceedings paper