SIGEM, low temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits

Ramos-Martos, JuanJuanRamos-MartosCeballos-Caceres, JoaquinJoaquinCeballos-CaceresRagel-Morales, AntonioAntonioRagel-MoralesMora=-Gutierrez, Jose MiguelJose MiguelMora=-GutierrezArias-Drake, AlbertoAlbertoArias-DrakeLagos-Florido, Miguel-ANgelMiguel-ANgelLagos-FloridoMunoz-Hinojosa, Jose MariaJose MariaMunoz-HinojosaMehta, AnshuAnshuMehtaVerbist, AgnesAgnesVerbistDu Bois, BertBertDu BoisKehr, KerstenKerstenKehrLeinenbach, ChristinaChristinaLeinenbachVan Aerde, StevenStevenVan AerdeSpengler, JorgJorgSpenglerWitvrouw, AnnAnnWitvrouw2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11082SIGEM, low temperature deposition of poly-SiGe MEMs structures on standard CMOS circuitsProceedings paper