Martin Hoyas, AnaAnaMartin HoyasSchuhmacher, JorgJorgSchuhmacherShamiryan, DenisDenisShamiryanWaeterloos, JoostJoostWaeterloosBesling, W.W.BeslingCelis, Jean-PierreJean-PierreCelisMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9273Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer filmsJournal article