Intercomparison of 2-D carrier profiles in MOSFET structures obtaind with scanning resistance microscopy and inverse modeling

De Wolf, PeterPeterDe WolfVandervorst, WilfriedWilfriedVandervorstSmith, H.H.SmithKhalil, N.N.Khalil2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3393Intercomparison of 2-D carrier profiles in MOSFET structures obtaind with scanning resistance microscopy and inverse modelingProceedings paper