Carrier mobility in undoped triple-gate FinFET structures and limitations of its description in terms of top and sidewall channel mobilities

Rudenko, TamaraTamaraRudenkoKilchytska, ValeriaValeriaKilchytskaCollaert, NadineNadineCollaertJurczak, GosiaGosiaJurczakNazarov, A.A.NazarovFlandre, DenisDenisFlandre2021-10-172021-10-1720080018-9383https://imec-publications.be/handle/20.500.12860/14403Carrier mobility in undoped triple-gate FinFET structures and limitations of its description in terms of top and sidewall channel mobilitiesJournal article