Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water

Tanaka, YoichiYoichiTanakaGan, NobukoNobukoGanOgawa, YuuichiYuuichiOgawaIino, HideakiHideakiIinoHomkar, SuvidyakumarSuvidyakumarHomkarChang, Ren-JieRen-JieChangAlessio Verni, GiuseppeGiuseppeAlessio VerniGivens, MichaelMichaelGivensLai, Ju GengJu GengLaiPacco, AntoineAntoinePaccoBrus, StephanStephanBrusArimura, HiroakiHiroakiArimuraOniki, YusukeYusukeOnikiAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteynsHoriguchi, NaotoNaotoHoriguchi2025-02-102023-09-052025-02-102023-081012-0394https://imec-publications.be/handle/20.500.12860/42470Study on Alternative Dipole Material Wet Clean by pH Controlled Functional WaterProceedings paperhttps://doi.org/10.4028/p-QqI9w5Electrical & electronic engineeringDipole shifter, RMG, functional water, ammonium solution