Sarikov, AndreyAndreySarikovLitovchenko, VladimirVladimirLitovchenkoLisovskyy, IgorIgorLisovskyyVoitovich, MariaMariaVoitovichZlobin, SergeiSergeiZlobinKladko, VasylVasylKladkoSlobodyan, NikolayNikolaySlobodyanMachulin, VladimirVladimirMachulinClaeys, CorCorClaeys2021-10-192021-10-1920110013-4651https://imec-publications.be/handle/20.500.12860/19730Mechanisms of oxygen precipitation in Cz-Si wafers subjected to rapid thermal annealsJournal article