Rottenberg, XavierXavierRottenbergDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmansDe Wolf, IngridIngridDe Wolf2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14396RF-MEMS design for reliabilityOral presentation