Material optimization of phosphorus-doped polycrystalline silicon germanium for miniaturized thermoelectric generator

Wang, ZiyangZiyangWangSu, JialeJialeSuvan Andel, YvonneYvonnevan AndelNguyen, H.H.NguyenVullers, RuudRuudVullers2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20139Material optimization of phosphorus-doped polycrystalline silicon germanium for miniaturized thermoelectric generatorProceedings paper