Nested Sampling aided determination of tantalum optical constants in the EUV spectral range

Saadeh, QaisQaisSaadehNaujok, PhilippPhilippNaujokWu, MeiyiMeiyiWuPhilipsen, VickyVickyPhilipsenThakare, DeveshDeveshThakareScholze, FrankFrankScholzeBuchholz, ChristianChristianBuchholzStadelhoff, ChristianChristianStadelhoffWiesner, ThomasThomasWiesnerSoltwisch, VictorVictorSoltwisch2023-03-162022-12-262023-01-052023-03-1620221559-128XWOS:000895994800002https://imec-publications.be/handle/20.500.12860/40915Nested Sampling aided determination of tantalum optical constants in the EUV spectral rangeJournal article10.1364/AO.472556WOS:000895994800002X-RAY REFLECTIVITYEXTREME-ULTRAVIOLETTHIN-FILMSREFLECTANCESCATTERINGTHICKNESSSURFACEDESIGNDIFFRACTIONEFFICIENT